ellipsometric thickness measurement

ellipsometric thickness measurement
ellipsometric thickness measurement MO ellipsometrische Dickenmessung f

English-German dictionary of Electrical Engineering and Electronics. 2013.

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  • Ellipsometry — is a versatile and powerful optical technique for the investigation of the dielectric properties (complex refractive index or dielectric function) of thin films. It has applications in many different fields, from semiconductor physics to… …   Wikipedia

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